Merit Sensor HM Series

Product Features

Harsh media low and medium pressure MEMS sensing element
Suitable for air, gases and liquids that are compatible with silicon and glass
Bridge options of closed or closed with temperature diode available
Parts supplied as sawn wafer on tape in metal frame or die in waffle pack

Bridge
Impedance
Package / Size
Pressure Range
Pressure Type
Termination / Connection
Clear

Custom resistance value (Ω) *
Custom AT Range (AT) *
Custom Capacity (lbs) *
Custom Pressure (Bar/PSI) *
Custom Resistance Value Element 1 (Ω) *
Custom Resistance Value Element 2 (Ω) *
Custom lead length (mm) *
Custom lead length (inches) *

Quantity

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The HM series harsh media pressure MEMS sensing elements from Merit Sensor^TM is ideal for low and medium OEM applications, offering available pressure ranges of between 15psi and 500psi. The sensors utilise a piezoresistive Wheatstone bridge in a design that anodically bonds glass to a chemically etched silicon diaphragm. This pressure sensor series offers an operating temperature of −40°C to +150°C and a full scale output range from 75mV or 175mv (depending on the pressure range). The HM series from Merit Sensor^TM products incorporate a proprietary Sentium® technology, developed to provide a best-in-class operating temperature range and superior stability.

Broad pressure MEMS sensing elements
Pressure ranges available 15psi, 50psi, 100psi, 300psi and 500psi
Absolute pressurised from the cavity side or gauge pressurised from either side of the diaphragm
Temperature range −40°C to +150°C
Typical full scale output (at 5V excitation) 75mV at 15psi, 150mV at 100psi, 135mV at 300psi and 175mV at 500psi
Impedance of 5kΩ (typical) or 3.5kΩ (optional)
Suitable for air, gases and liquids that are compatible with silicon and glass
Sawn wafer on tape in metal frame or die in waffle pack
Bridge options of closed or closed with temperature diode
AEC-Q100 qualified

Typical applications for the Merit Sensor^TM HM series include:

Industrial
Aerospace
Automotive
Medical

Please see below the specifications for the Merit Sensor^TM HM series:

Specifications

Weight	0.00000 kg
Dimensions	1.40 x 2.08 x 2.08mm
Bridge	Closed, Closed with Temperature Diode
Impedance	3.5kΩ, 5kΩ
Output	75mV, 135mV, 150mV, 175mV
Package / Size	Bare Die, Sawn Wafer
Pressure Range	15 psi, 100 psi, 300 psi, 500 psi
Pressure Type	Absolute, Gauge
Series / Model	HM
Temperature Range (°C)	-40 to +150°C
Product Type	MEMS Silicon Dies

Merit Sensor HM Series Ordering Info

Below is an example of the part number break down for the HM series:

SKU	Bridge	Impedance	Package / Size	Pressure Range	Pressure Type	Termination / Connection
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	100 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	100 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	100 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	100 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	100 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	100 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	100 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	100 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	100 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	100 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	100 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	100 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	100 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	100 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	100 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	100 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	15 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	15 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	15 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	15 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	15 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	15 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	15 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	15 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	15 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	15 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	15 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	15 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	15 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	15 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	15 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	15 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	300 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	300 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	300 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	300 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	300 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	300 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	300 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	300 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	300 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	300 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	300 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	300 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	300 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	300 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	300 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	300 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	500 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	500 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	500 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	500 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	500 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	500 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	500 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	500 psi	Absolute	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	500 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	500 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	500 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	500 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	500 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	500 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	500 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	500 psi	Gauge	Au Backmetal	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	100 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	100 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	100 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	100 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	100 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	100 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	100 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	100 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	100 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	100 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	100 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	100 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	100 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	100 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	100 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	100 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	15 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	15 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	15 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	15 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	15 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	15 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	15 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	15 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	15 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	15 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	15 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	15 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	15 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	15 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	15 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	15 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	300 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	300 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	300 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	300 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	300 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	300 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	300 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	300 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	300 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	300 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	300 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	300 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	300 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	300 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	300 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	300 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	500 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	500 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	500 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	500 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	500 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	500 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	500 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	500 psi	Absolute	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Bare Die	500 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Bare Die	500 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	3.5kΩ	Sawn Wafer	500 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	3.5kΩ	Sawn Wafer	500 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Bare Die	500 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Bare Die	500 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed	5kΩ	Sawn Wafer	500 psi	Gauge	None	Request Quote
Merit Sensor HM Series	Closed with Temperature Diode	5kΩ	Sawn Wafer	500 psi	Gauge	None	Request Quote